Thermal effect on the optical and morphological properties of TiO2 thin films obtained by annealing Ti metal layer

Abstract

Titanium metal layers of different thicknesses were deposited on optical glass, quartz and ceramic substrates at 50°C and 150°C substrate temperature with the help of magnetron deposition. Metal layers were converted into rutile phase of TiO2 at different annealing temperatures. The effect of thermal annealing on the morphology and refractive index of the thin film was investigated.