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dc.date2016
dc.date.accessioned2025-08-22T12:18:41Z-
dc.date.available2025-08-22T12:18:41Z-
dc.date.issued2016
dc.identifier.identifierDspace\SGAU\20161209\60667
dc.identifier.citationМатериалы Международной конференции и молодёжной школы «Информационные технологии и нанотехнологии», с. 308-312
dc.identifier.isbn978-5-7883-1078-7
dc.identifier.urihttp://repo.ssau.ru/jspui/handle/123456789/12311-
dc.description.abstractTitanium metal layers of different thicknesses were deposited on optical glass, quartz and ceramic substrates at 50°C and 150°C substrate temperature with the help of magnetron deposition. Metal layers were converted into rutile phase of TiO2 at different annealing temperatures. The effect of thermal annealing on the morphology and refractive index of the thin film was investigated.
dc.languageen
dc.publisherИздательство СГАУ
dc.titleThermal effect on the optical and morphological properties of TiO2 thin films obtained by annealing Ti metal layer
dc.typeArticle
local.identifier.oldurihttp://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Thermal-effect-on-the-optical-and-morphological-properties-of-TiO2-thin-films-obtained-by-annealing-Ti-metal-layer-60667
local.identifier.oldurihttp://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Thermal-effect-on-the-optical-and-morphological-properties-of-TiO2-thin-films-obtained-by-annealing-Ti-metal-layer-60667
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