Samara University Repository
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This is an open electronic archive created to preserve and disseminate the scientific results of our university. The works of researchers, faculty members, and students are available to everyone for academic and research purposes.
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| Title: | Investigation of a linear variable optical filter (LVOF) manufacturing process |
| Issue Date: | 2019 |
| Publisher: | Изд-во «Новая техника» |
| Citation: | Fomchenkov S.A. Investigation of a linear variable optical filter (LVOF) manufacturing process / S.A. Fomchenkov, A.P. Porfirev // Сборник трудов ИТНТ-2019 [Текст] : V междунар. конф. и молодеж. шк. "Информ. технологии и нанотехнологии" : 21-24 мая : в 4 т. / Самар. нац.-исслед. ун-т им. С. П. Королева (Самар. ун-т), Ин-т систем. обраб. изобр. РАН-фил. ФНИЦ "Кристаллография и фотоника" РАН ; [под ред. Р. В. Скиданова]. - Самара: Новая техника, 2019. - Т. 1 : Компьютерная оптика и нанофотоника. - 2019. - С. 649-651. |
| Abstract: | This paper reports on fabrication process for Linear Variable Optical Filters (LVOF). This LVOF can be fabricated in a resist layer by just one lithography step. The profile of resist structure is subsequently transferred into quartz substrate by plasma etching. Complete LVOF fabrication involves deposition of a lower dielectric mirror using a stack of dielectrics on the substrate, tapered layer formation and deposition of the top dielectric mirror [1]. Shown possibility of LVOF using in experimental hyperspectral setups. |
| URI: | http://repo.ssau.ru/jspui/handle/123456789/11371 |
| Appears in Collections: | Информационные технологии и нанотехнологии |
| File | Description | Size | Format | |
|---|---|---|---|---|
| paper116.pdf | 259.78 kB | Adobe PDF | View/Open |
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