Investigation of a linear variable optical filter (LVOF) manufacturing process

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DC Field	Value	Language
dc.date	2019
dc.date.accessioned	2025-08-22T12:19:31Z	-
dc.date.available	2025-08-22T12:19:31Z	-
dc.date.issued	2019
dc.identifier.identifier	Dspace\SGAU\20190424\75825
dc.identifier.citation	Fomchenkov S.A. Investigation of a linear variable optical filter (LVOF) manufacturing process / S.A. Fomchenkov, A.P. Porfirev // Сборник трудов ИТНТ-2019 [Текст] : V междунар. конф. и молодеж. шк. "Информ. технологии и нанотехнологии" : 21-24 мая : в 4 т. / Самар. нац.-исслед. ун-т им. С. П. Королева (Самар. ун-т), Ин-т систем. обраб. изобр. РАН-фил. ФНИЦ "Кристаллография и фотоника" РАН ; [под ред. Р. В. Скиданова]. - Самара: Новая техника, 2019. - Т. 1 : Компьютерная оптика и нанофотоника. - 2019. - С. 649-651.
dc.identifier.uri	http://repo.ssau.ru/jspui/handle/123456789/11371	-
dc.description.abstract	This paper reports on fabrication process for Linear Variable Optical Filters (LVOF). This LVOF can be fabricated in a resist layer by just one lithography step. The profile of resist structure is subsequently transferred into quartz substrate by plasma etching. Complete LVOF fabrication involves deposition of a lower dielectric mirror using a stack of dielectrics on the substrate, tapered layer formation and deposition of the top dielectric mirror [1]. Shown possibility of LVOF using in experimental hyperspectral setups.
dc.language	en
dc.publisher	Изд-во «Новая техника»
dc.title	Investigation of a linear variable optical filter (LVOF) manufacturing process
dc.type	Article
local.identifier.olduri	http://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Investigation-of-a-linear-variable-optical-filter-LVOF-manufacturing-process-75825
local.identifier.olduri	http://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Investigation-of-a-linear-variable-optical-filter-LVOF-manufacturing-process-75825
Appears in Collections:	Информационные технологии и нанотехнологии

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