Разработка приборов анализа и повышения степени чистоты поверхности диоксида кремния

Кричевский С. В.

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Title:	Разработка приборов анализа и повышения степени чистоты поверхности диоксида кремния
Authors:	Кричевский С. В.
Keywords:	диоксид кремния экспериментальная физика приборы анализа и повышения степени чистоты поверхности
Issue Date:	2008
Citation:	Кричевский, С. В. Разработка приборов анализа и повышения степени чистоты поверхности диоксида кремния [Электронный ресурс] : автореферат дис. ... канд. техн. наук : 01.04.01 / С. В. Кричевский ; Самар. гос. аэрокосм. ун-т им. С. П. Королева, Ин-т систем обраб. изображений РАН. - Самара, 2008. - on-line
Abstract:	Труды сотрудников СГАУ (электрон. версия) Используемые программы: Adobe Acrobat
URI:	http://repo.ssau.ru/jspui/handle/123456789/18977
Appears in Collections:	Авторефераты

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