UV-LIGA fabrication process for realization of metal based MEMS gyroscope

Abstract

This paper reports the complete fabrication process flow based on UV-LIGA technology for realization of metal based MEMS gyroscope. In this process, nickel is used as the structural layer and copper as the sacrificial layer. The economical three mask process has been optimized and the detailed step by step procedure for carrying out the fabrication is presented. The fabrication results after each process step have been presented and discussed. Scanning electron micrograph images of the released prototype gyroscope devices have been presented to demonstrate the successful fabrication of the prototypes.