Analysis and optimization of photonics devices manufacturing technologies based on carbon nanotubes

Abstract

The analysis and optimization of optical devices manufacturing technologies based on carbon nanotubes intended for work in the terahertz range were carried out. These processes studied in the work have practical application for the deposition of carbon nanotubes and their subsequent use as materials for prototypes of the waveguide and sensor of the terahertz range. To obtain a layer of carbon nanotubes, a chemical vapor deposition chamber was used. Various aspects of the synthesis and growth of the mechanism of CNT are considered in this article. Carbon nanotubes (CNTs) were grown on a sandwich structure based on a silicon wafer, where a layer of aluminum and copper 100 nm thick was deposited, then an iron catalyst was applied about 5 nm thick, and then copper and aluminum were deposited again, but with a thickness of 10 nm layer is also using magnetron sputtering. The growth was carried out with two variable parameters: flow rate and flow duration.