Отрывок: Atomic force microscopy images of sensing film in 2D and 3D The semiconductor films work at a particular temperature, i.e., the surface reactions between the sensing film and the gas to be sensed takes place at an optimum temperature. Sensitivities at different temperatures were computed so as to discover the optimum temperature. The sensitivity was calculated using the formula S= (Rf – Ri) X 100/Ri, where Rf is the final resistance obtained after the reaction with gas and Ri is the init...
Название : Acetone detection using thin tungsten oxide (WO3) film based gas sensor
Авторы/Редакторы : Sachdeva, Smiti
Prajesh, Rahul
Bhargava, Jitendra
Sharma, Ashok Kumar
Agarwal, Ajay
Agarwal, Ravinder
Ключевые слова : tungsten oxide
thin films
gas sensor
Дата публикации : 2016
Издательство : Издательство СГАУ
Библиографическое описание : Материалы Международной конференции и молодёжной школы «Информационные технологии и нанотехнологии», с. 147-152
Аннотация : Acetone being a volatile organic compound is found in human breath. Non-invasive breath analysis for detection of diabetes has gained remarkable attention for the past few years. Human breath has ample of volatile organic compounds pertaining to numerous diseases in the body. Acetone in breath has been proven to be an important biomarker for diagnosis of diabetes through breath. Here, tungsten oxide (WO3) thin films of nanometer thickness have been used for this purpose. The detector films are sputtered over silicon dioxide layer and corresponding connections are made over the film to measure the resistance change. Acetone, being a reducing gas, reduces the resistance of the film as it comes in contact. Different concentrations in parts per million (ppm) have been tested on these nanometer films having thickness of 100 nm over a chip size of 5 mm x 5 mm, as low as 1.2 ppm. Optimum temperature has also been computed to be 300 oC. The topography of film has been characterized by atomic force microscopy (AFM) and a mean grain size of 24.1 nanometers has been observed.
URI (Унифицированный идентификатор ресурса) : http://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Acetone-detection-using-thin-tungsten-oxide-WO3-film-based-gas-sensor-60635
ISBN : 978-5-7883-1078-7
Другие идентификаторы : Dspace\SGAU\20161208\60635
Располагается в коллекциях: Информационные технологии и нанотехнологии

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