Отрывок: 1. In this design, the structure is comprised of two masses,𝑚1 and 𝑚2, supported by flexures as shown in the figure. There is an intermediate frame mass, 𝑚𝑓 which acts as a decoupling mass. The spring, 𝑘𝑎 in the x-direction, connects the decoupling frame mass, 𝑚𝑓, to an inner an- chor.This structure is based on anchoring of the frame mass, which acts as a decoupling mass between the drive and sense masses. This configuration provides a reduced bandwidth and de- coup...
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dc.contributor.authorVerma, Payal-
dc.contributor.authorKhan, K. Zaman-
dc.contributor.authorKhonina, S.N.-
dc.contributor.authorSkidanov, R.V.-
dc.contributor.authorKazanskiy, N.L.-
dc.contributor.authorGopal, R.-
dc.date.accessioned2016-12-08 16:40:52-
dc.date.available2016-12-08 16:40:52-
dc.date.issued2016-
dc.identifierDspace\SGAU\20161208\60658ru
dc.identifier.citationМатериалы Международной конференции и молодёжной школы «Информационные технологии и нанотехнологии», с. 279-282ru
dc.identifier.isbn978-5-7883-1078-7-
dc.identifier.urihttp://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/UVLIGA-fabrication-process-for-realization-of-metal-based-MEMS-gyroscope-60658-
dc.description.abstractThis paper reports the complete fabrication process flow based on UV-LIGA technology for realization of metal based MEMS gyroscope. In this process, nickel is used as the structural layer and copper as the sacrificial layer. The economical three mask process has been optimized and the detailed step by step procedure for carrying out the fabrication is presented. The fabrication results after each process step have been presented and discussed. Scanning electron micrograph images of the released prototype gyroscope devices have been presented to demonstrate the successful fabrication of the prototypes.ru
dc.language.isoenru
dc.publisherИздательство СГАУru
dc.subjectMEMSru
dc.subjectUV-LIGAru
dc.subjectSU8ru
dc.titleUV-LIGA fabrication process for realization of metal based MEMS gyroscoperu
dc.typeArticleru
dc.textpart1. In this design, the structure is comprised of two masses,𝑚1 and 𝑚2, supported by flexures as shown in the figure. There is an intermediate frame mass, 𝑚𝑓 which acts as a decoupling mass. The spring, 𝑘𝑎 in the x-direction, connects the decoupling frame mass, 𝑚𝑓, to an inner an- chor.This structure is based on anchoring of the frame mass, which acts as a decoupling mass between the drive and sense masses. This configuration provides a reduced bandwidth and de- coup...-
Располагается в коллекциях: Информационные технологии и нанотехнологии

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