Отрывок: The proof mass is provided with perforations for the purpose of damping and for sacrificial release of the structure. Care should be taken in the mechanical design to avoid features of varying sizes which would otherwise hamper the release process. Accordingly the structure is designed and the dimensional parameters of the beams, proof mass and other features of the structural layer are given in Table-1. (a) (b) Fig. 1. (a) Device layout; (b)...
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dc.contributor.authorVerma, Payal-
dc.contributor.authorReddy, A.N.K.-
dc.contributor.authorPavelyev, V.S.-
dc.contributor.authorAndreeva, T.V.-
dc.contributor.authorFomchenkov, S.A.-
dc.contributor.authorKhonina, S.N.-
dc.date.accessioned2017-05-02 12:15:59-
dc.date.available2017-05-02 12:15:59-
dc.date.issued2017-
dc.identifierDspace\SGAU\20170428\63576ru
dc.identifier.citationVerma P. Design and simulation of a SOI based mems differential accelerometer /Payal Verma, A.N.K. Reddy, V.S. Pavelyev, T.V. Andreeva, S.A. Fomchenkov, S.N. Khonina // Сборник трудов III международной конференции и молодежной школы «Информационные технологии и нанотехнологии» (ИТНТ-2017) - Самара: Новая техника, 2017. - С. 14-17.ru
dc.identifier.urihttp://repo.ssau.ru/handle/Informacionnye-tehnologii-i-nanotehnologii/Design-and-simulation-of-a-SOI-based-mems-differential-accelerometer-63576-
dc.description.abstractIn this paper, the design and analysis of a differential MEMS capacitive accelerometer is presented. The device is designed to be compatible for SOI based fabrication process. The outstanding mechanical and electrical properties of silicon on insulator (SOI) wafers make it popular for high-performance MEMS sensors such as accelerometers. The operating range of the designed device is 0-10g with its sense axis in the in-plane direction. The movable comb fingers attached to the proof mass form capacitors with the fixed electrode fingers. The movable and fixed fingers are spaced with unequal gaps to form the differential capacitive sensing configuration. The base capacitance of this configuration is about 0.77pF and the sensitivity in response to acceleration input is about 0.776 fF/g. The resonance frequency of the structure in the sensing mode is found to be 7.138 kHz.ru
dc.description.sponsorshipThe work was partially funded by the Russian Federation Ministry of Education and Science.ru
dc.language.isoenru
dc.publisherНовая техникаru
dc.subjectMEMSru
dc.subjectAccelerometerru
dc.subjectDRIEru
dc.subjectCoventorWare®ru
dc.subjectSOIru
dc.titleDesign and simulation of a SOI based mems differential accelerometerru
dc.typeArticleru
dc.textpartThe proof mass is provided with perforations for the purpose of damping and for sacrificial release of the structure. Care should be taken in the mechanical design to avoid features of varying sizes which would otherwise hamper the release process. Accordingly the structure is designed and the dimensional parameters of the beams, proof mass and other features of the structural layer are given in Table-1. (a) (b) Fig. 1. (a) Device layout; (b)...-
Располагается в коллекциях: Информационные технологии и нанотехнологии

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